MODULATORS :: APPLICATIONS:: Ellipsometry

In ellipsometry, the polarization change of a light beam is measured when it is reflected by the sample. This change in polarization is then related to the sample’s properties.

ELLIPSOMETRIC PARAMETERS ( and ) 



ONE EXAMPLE OF COMMON SETUPS USING A PEM

RELATIONSHIPS

APPLICATIONS
Material and surface characterization; surface science; material science; semiconductor industry

RESOURCES

PEM's in Ellipsometry Application Note   Calcualting Psi and Delta with a PEM

ADDITIONAL TOOLS
Ellipsometry Complete Solution Packages


FURTHER READING
S. N. Jasperson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique,” Rev. Sci. Instrum. 40, 761-767 (1969); Errata 41, 152 (1970).

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, (North-Holland, Amsterdam, 1987), pp 260-262, 415-416. 

G. E. Jellison, Jr. and F. A. Modine, “Two-channel Polarization Modulation Ellipsometry,” Appl. Opt. 29, 959-974 and references within.

G. E. Jellison, Jr. and F. A. Modine, “Two Modulator Generalized Ellipsometry: Theory,” Appl. Opt. 36, 8190-8198 and references within

G. E. Jellison, Jr. and F. A. Modine,“Two Modulator Generalized Ellipsometry: Experiment and Calibration,” Appl. Opt. 36, 8184-8189.