Exicor® AT Series

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Exicor® 150AT

Exicor® AT Series

The AT Series is the original member of the Exicor birefringence measurement system family of products. It also includes the workhorse model, serving both R&D and production requirements.

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Benefits of the Exicor® AT

  • The standard high speed scanning package, Scan in Motion™ or SIM, makes high spatial resolution scans (<1 mm grid spacing) practical.
  • Unprecedented sensitivity in low-level birefringence measurement
  • Simultaneous measurement of birefringence magnitude and angle
  • Precision repeatability
  • High-speed measurement
  • Automatic mapping

Intuitive Operation

Simple, user-friendly operation guided by software. Become more efficient with your testing, data gathering, and information analysis.

No Moving Optics

Increased consistency during measuring because you’re not constantly having to readjust stage, materials, or other variables.

Applications

Ideal for use on semiconductor wafer inspection and photomask quality assessment.

Exicor® Systems Brochure Exicor® 120AT Product Bulletin Exicor® 150AT Product Bulletin Exicor® 250AT Product Bulletin

Available Models icon to encourage swiping

Exicor 120AT - Left view

Exicor® 120AT
Exicor® 150AT

Exicor® 150AT
Exicor-150-AT

Exicor® 250AT
Exicor® 300AT

Exicor® 300AT
Exicor® 500AT

Exicor® 500AT
System Size: 715mm (H) x 350mm (W) x 360mm (D) 413mm (W) x 693mm (D) x 909mm (H) 910mm (H) x 415mm (W) x 700mm (D) 120cm (L) x 130cm (W) x 200cm (H) 150cm (L) x 150cm (W) x 200cm (H)
Max. Sample Size: up to 120mm x 100mm up to 150mm x 150mm up to 250mm x 250mm up to 300mm x 300mm and 250+mm thick up to 500mm X 500mm and 400+mm thick

System Details

Custom configurations and accessories are available for these models. Please contact a representative for more details.

Features

Features of 120AT, 150AT & 250AT Models

  • Automated XY stage
  • 2D and 3D graphical representation of birefringence parameters
  • Bench top design
  • Flexible stage design for adding custom parts holders or process aids
  • Advanced data analysis features included standard in user interface

Features of 300AT & 500AT Models

  • Heavy duty automated XY stage
  • 2D and 3D graphical representation of birefringence parameters
  • 3-sided easy access stage loading design
  • Large and flexible stage platform design for adding custom parts holders or process aids
  • Advanced data analysis features included standard in user interface
Specifications
120AT All Other AT Models
Retardation Range: 0.005 to 300+ nm 0.005 to 300+ nm
Retardation Resolution / Repeatability1, 2: 0.001 nm / ± 0.02 nm 0.001 nm / ± 0.015 nm
Angular Resolution / Repeatability1: 0.01º / ± 0.07° 0.01º / ± 0.07°
Measurement Rate / Time3: 15 samples/sec (at 1nm spacing) up to 100 pps / sample size dependent
Light Source Wavelength4: Various (625nm standard) Various (632.8 nm standard)
Measurement Spot Diameter5: Between 1 mm and 3 mm (can be as low as <50 µm) Between 1 mm and 3 mm (can be as low as <50 µm)
Modulation Technique / Frequency: PEMLabsTM Photoelastic Modulator / 50 kHz and 50/60 kHz PEMLabsTM Photoelastic Modulator / 50 kHz and 50/60 kHz
Demodulation Analysis Technique: Hinds Instruments SignalocTM Lock-in Amplifier Hinds Instruments SignalocTM Lock-in Amplifier
Measurement Units: nm (retardation), ° (angle) nm (retardation), ° (angle)
  • 1 Typical performance at 5nm retardation
  • 2 Up to 1.5 nm, 1% thereafter
  • 3 Maximum data collection speed. Sample XY scan time dependent on stage movement parameters.
  • 4 Custom wavelengths available
  • 5 Measurement spot sizes of less than 1mm (native) require optional high resolution detector module
Options
  • Additional polarization parameters
  • Hinds SIM™ Solution (Scan in Motion – High Speed Scanning Hardware and Software)
  • Spectroscopic and RGB measurement solutions
  • Custom wavelengths (VIS, NIR)
  • Manual and automated tilt stages
  • Custom sample holders
  • Custom software (UI or DLL)
  • Third party automation support
  • Stress estimation calculations
Resources
Dimensions
Applications
Techniques
Further Reading
Worldwide Offices
Africa

Africa

Hinds Instruments, Inc.
7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

Americas

Americas

Hinds Instruments, Inc.
7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

Asia

India

Laser Science Services (I) Pvt. Ltd.  
Offices in Navi Mumbai, Chennai, Delhi, Kolkata
Head Office:
A-454, TTC Industrial Area
MIDC, Mahape
Navi Mumbai, 400 710
INDIA

 

SciTech Incorporations
D-81 Patel Nagar 2nd
Ghaziabad
Uttar Pradesh 201001
INDIA
Email: sales@scitechincorp.com
URL: www.scitechincorp.com


Japan

Tokyo Instruments Inc.
Attn: Mr. Toshihiko Masuda
T.I.Building,
6-18-14 Nishikasai Edogawa-Ku,
Tokyo 134-0088
JAPAN

Phone: +81 3 (3686) 4711

Fax: +81 3 (3686) 0831

Website: https://www.tokyoinst.co.jp


PR China

OPCrown Photonics Co., Ltd
Room 1006, No.7, Shilong Innovation Building
Yard 98, Lianshihu West Road
Mentougou District, Beijing
Phone: 010-68214292
Fax: 010-68214191
Email: sales@opcrown.com
URL: www.opcrown.com

Bright Stars Technologies Co., Ltd – China HQ
Room 427, Building 12,
No. 55 Shuiyun Road,
Nanhui Xincheng Town, Pudong New Area 201306 Shanghai
Phone: +86-21-51083793
Fax: +86-21-34241962
URL: www.auniontech.com


South Korea

Opto Mechanical Associates (OMA) Co.
405-11,
Goong-dong,
Yusung-gu Daejeon 305 335
KOREA

Phone: +82 42 822 9501-3

Fax: +82 42 822 9504

Website: https://www.omacom.co.kr


Taiwan

Titan Electro-Optics Co., Ltd.
14F., No. 19-11, Sanchong Rd.
Nangang Dist., Taipei City 115, Taiwan
Phone: +886-2-2655-2200 ext. 186
Fax: +886-2-2655-2233
Email: sales@teo.com.tw
URL: www.teo.com.tw

Australia

Australia

Hinds Instruments, Inc.
7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

Europe

Austria

Acal BFi Germany GmbH
Oppelner Straße 5
82194 Gröbenzell
GERMANY
Contact: Robert Kardinal

Phone: +49 (0) 8142 6520 119

Fax: +49 (0) 8142 6520 190

Website: http://www.acalbfi.de/photonics


Belarus (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: http://www.spectropol.pl/


Czech Republic (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


Denmark

Acal BFi Nordic AB (Denmark)
Jernbanegade 23 B
DK-4000 Roskilde
DENMARK

Phone: +45 (0) 7026 2225

Fax: +45 (0) 7026 2221

Website: https://www.acalbfi.com/se


Estonia (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


Finland

Acal BFi Nordic AB (Finland)
Teknobulevardi 3-5
FI-01530 Vantaa
FINLAND

Phone: +358 (0) 207 969 770

Fax: +358 (0) 207 969 771

Website: https://www.acalbfi.com/se


France

Acal BFi France SAS
1 allée de la Chartreuse
91080 Evry-Courcouronnes
FRANCE
Contact: Jocelyn TANAÏS

Phone: +33 (0) 1 60 79 59 06

Fax: +33 (0) 1 60 79 89 01

Website: https://www.acalbfi.com/fr


Germany

Acal BFi Germany GmbH
Oppelner Straße 5
82194 Gröbenzell
GERMANY
Contact: Robert Kardinal

Phone: +49 (0) 8142 6520 119

Fax: +49 (0) 8142 6520 190

Website: https://www.acalbfi.com/de


Ireland

Acal BFi UK Limited
Room 1.09
Challenge House
Sherwood Drive
Bletchley
Milton Keynes
MK3 6DP
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1908 221 110
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk

Acal BFi UK Limited
3 The Business Centre
Molly Millars Lane
Wokingham
Berkshire
RG41 2EY
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1189 776 095
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk


Italy

Acal BFi Italy S.r.I.
Via Cascina Venina n.20
20090 Assago
Milan
ITALY
Phone: +39 (02) 53583.1
Fax: +39 (02) 53583201
Email: sales-it@acalbfi.it
URL: www.acalbfi.com

Laser Optronic SRL
Via Bernardo Quaranta, 57
20139 Milano (MI)
ITALY
Phone: +39 (02) 574651
Fax: +39 (02) 57410127
Email: lop@laseroptronic.it


Latvia (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl/


Lithuania (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl/


Norway

Acal BFi Nordic AB (Norway)
PO Box 74
3529 Ryse
NORWAY

Phone: +47 3216 2060

Fax: +47 3216 2069

Website: https://www.acalbfi.com/se


Poland (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


Slovakia (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


Sweden

Acal BFi Nordic AB (Sweden)
Falhagsleden 59
PO Box 1335
SE-751 43 Uppsala
SWEDEN

Phone: +46 (0) 1856 5830

Fax: +46 (0) 1869 6666

Website: https://www.acalbfi.com/se


Switzerland

GMP SA
Avenue des Baumettes 17
CH – 1020 Renes

Phone: +41 21 633 21 21

Fax: +41 21 633 21 29

Website: https://www.gmp.ch


The Netherlands

Alphen aan den Rijn

Acal BFi Netherlands BV
J.P. Thijsseweg 1e
2408 ER Alphen aan den Rijn
THE NETHERLANDS
Phone: +31 (0) 1 7244 6060
Fax: +31 (0) 1 7244 3414
Email: sales-nl@acalbfi.nl
URL: www.acalbfi.com/nl

Eindhoven

Acal BFi Netherlands BV
Luchthavenweg 53
5657 EA Eindhoven
THE NETHERLANDS
Phone: +31 (0) 4 0250 7400
Fax: +31 (0) 4 0250 7409
Email: sales-nl@acalbfi.nl
URL: www.acalbfi.com/nl


Ukraine (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


United Kingdom

Pro-Lite Technology Limited
Innovation Centre, University Way
Cranfield, MK43 0BT, UK
Contact: Ross Tomlin
Phone: +44 (0)1234 436110
Email: ross.tomlin@pro-lite.co.uk
Website: www.pro-lite.co.uk

Milton Keynes

Acal BFi UK Limited
Room 1.09
Challenge House
Sherwood Drive
Bletchley
Milton Keynes
MK3 6DP
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1908 221 110
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk

Wokingham

Acal BFi UK Limited
3 The Business Centre
Molly Millars Lane
Wokingham
Berkshire
RG41 2EY
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1189 776 095
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk

Middle East

Middle East

Hinds Instruments, Inc.
7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

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