500 AT Birefringence Measurement System
The Exicor 500AT is the all new frame design replacing the Exicor 450AT systems. This new ‘Heavy Lifter’ of the Exicor® birefringence measurement system family brings a new efficiency and improved robustness to accommodate even larger and more numerous samples. This model is ideal for measuring thick lens blanks for lithography applications as well as other large and heavy parts (up to 500mm X 500mm and 400+mm thick). The 500AT improves on the proven frame and motion control components that are the hallmarks of the Hinds Instruments Exicor 450AT systems.
The new design has a full forward easy access stage that allows the sample measurement area to completely clear all potential obstacles on three sides and above the sample. The larger stage also allows for loading multiple parts at one time for batch scanning applications, as well as giving more clear access for production line automation integration applications. By adding the optional Exicor Zones™ software to the 500AT the system can be setup to execute automated routines to scan each part individually and assign individual file names to each ‘zone’. This software allows the user to begin the routine and let it run for multiple shifts, overnight or even longer (depending on the application) without having to intervene.
With two measurement range options available to choose from (High Sensitivity and Extended Range) the system is well-suited to address the demanding requirements of your large samples. The optional high speed scanning package makes high spatial resolution scans (<1mm grid spacing) practical.
- Heavy duty automated XY stage
- 2D and 3D graphical representation of birefringence parameters
- 3 side easy access stage loading design
- Large and flexible stage platform design for adding custom parts holders or process aids
- Advanced data analysis features included standard in user interface
|High Sensitivity||Extended Range|
|Retardation Range:||0.005 to 120+ nm||0.005 to 300+ nm|
|Retardation Resolution / Repeatability1, 2, 3:||0.001 nm / ± 0.008 nm||0.001 nm / ± 0.015 nm|
|Angular Resolution / Repeatability1:||0.01º / ± 0.05º||0.01º / ± 0.07º|
|Measurement Rate / Time4:||up to 100 pps / sample size dependent|
|Size (cm):||150 (L) x 150 (W) x 200 (H)|
|Light Source Wavelength5:||Various (632.8 nm standard)|
|Measurement Spot Diameter6:||Between 1 mm and 3 mm native (can be as low as <50 µm)|
|Modulation Technique / Frequency:||PEMLabsTM Photoelastic Modulator / 50 kHz and 50/60 kHz|
|Demodulation Analysis Technique:||Hinds Instruments SignalocTM Lock-in Amplifier|
|Measurement Units:||nm (retardation),° (angle)|
1 Typical performance at 5nm retardation
2 Up to 0.8 nm, 1% thereafter
3 Up to 1.5 nm, 1% thereafter
4 Maximum data collection speed. Sample XY scan time dependent on stage movement parameters.
5 Custom wavelengths available
6Measurement spot sizes of less than 1mm (native) require optional high resolution detector module
- Additional polarization parameters
- Hinds SIM™ Solution (Scan in Motion - High Speed Scanning Hardware and Software)
- Spectroscopic and RGB measurement solutions
- Custom wavelengths (VIS, NIR)
- Manual and automated tilt stages
- Custom sample holders
- Custom software (UI or DLL)
- Third party automation support
- Stress estimation calculations
Contact us for more information about the Exicor 500AT and to see how Hinds Instruments works with our customers to provide unsurpassed birefringence measurement metrology.