Exicor® HD Series

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Exicor 600HD

Exicor® HD Series

The new Heavy Duty Series Exicor allows customers to evaluate birefringence in their heaviest samples.

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This system is suitable for inspection and testing of semiconductor wafers and photomasks. Its design and intuitive automated scanning software make it well-suited for routine evaluation of semiconductor wafers and photomasks，The newly designed Exicor® HD system is based on the low-level birefringence measurement technology of the Exicor core and precise automated motion control components. The Exicor HD is designed with an all-steel base. This design improves the efficiency and stability of the Exicor birefringence measurement system series, enabling it to meet the sample measurement requirements.

Available Models icon to encourage swiping

Exicor 400HD

400HD
Exicor 600HD

600HD
Exicor 800HD

800HD
Exicor 1000HD

1000HD
Exicor 1500HD

1500HD
Exicor 2000HD

2000HD
System Size: 1265mm (X) x 1414mm (Y) x 2050 (Z) 1465mm (X) x 1614mm (Y) x 2050mm (Z) 1663mm (X) x 1814mm (Y) x 2050mm (Z) 1865mm (X) x 2014mm (Y) x 2050mm (Z) 2366mm (X) x 2662mm (Y) x 2050mm (Z) 2790mm (X) x 3162mm (Y) x 2050mm (Z)
Max. Sample Size: 400mm (X) x 400mm (Y) x 400mm (Z) 600mm (X) x 600mm (Y) x 500mm (Z) 800mm (X) x 800mm (Y) x 500mm (Z) 1m (X) x 1m (Y) x 500mm (Z) 1.5m (X) x 1.5m (Y) x 500mm (Z) 2m (X) x 2m (Y) x 500mm (Z)
Max Load w/ Sample & Holder: 450 lbs. / 205 kg 1,100 lbs. / 500 kg 1,910 lbs. / 865 kg 2,910 lbs. / 1,320 kg 6,600 lbs. / 3,000 kg 11,750 lbs. / 5,400 kg

System Details

Custom configurations and accessories are available for these models. Please contact a representative for more details.

Specifications
Retardation Range:0.005 to 300+ nm
Retardation Resolution / Repeatability1, 2:0.001 nm / ± 0.015 nm
Angular Resolution / Repeatability1:0.01º / ± 0.07º
Measurement Rate / Time3:up to 100 pps / sample size dependent
Light Source Wavelength4:Various (632.8 nm standard)
Measurement Spot Diameter5:Between 1mm & 3mm native (can be as low as <50 µm)
Modulation Technique:PEMLabsTM Photoelastic Modulator
Measurement Units:nm (retardation),º (angle)
Loading Options:Front and Overhead Options
  • 1 Typical performance at 5 nm retardation
  • 2 Up to 1.5 nm, 1% thereafter
  • 3 Maximum data collection speed. Sample XY scan time dependent on stage movement parameters.
  • 4 Custom wavelengths available
  • 5 Measurement spot sizes of less than 1mm (native) require optional high resolution detector module
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Worldwide Offices
Africa

Africa

Hinds Instruments, Inc.
7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

Americas

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7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

Asia

India

Laser Science Services (I) Pvt. Ltd.  
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MIDC, Mahape
Navi Mumbai, 400 710
INDIA

 

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Ghaziabad
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Tokyo 134-0088
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OPCrown Photonics Co., Ltd
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Mentougou District, Beijing
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Nanhui Xincheng Town, Pudong New Area 201306 Shanghai
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Taiwan

Titan Electro-Optics Co., Ltd.
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7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

Europe

Austria

Acal BFi Germany GmbH
Oppelner Straße 5
82194 Gröbenzell
GERMANY
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Phone: +49 (0) 8142 6520 119

Fax: +49 (0) 8142 6520 190

Website: http://www.acalbfi.de/photonics


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04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: http://www.spectropol.pl/


Czech Republic (Research Components)

SPECTROPOL
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04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

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Denmark

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POLAND

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Oppelner Straße 5
82194 Gröbenzell
GERMANY
Contact: Robert Kardinal

Phone: +49 (0) 8142 6520 119

Fax: +49 (0) 8142 6520 190

Website: https://www.acalbfi.com/de


Ireland

Acal BFi UK Limited
Room 1.09
Challenge House
Sherwood Drive
Bletchley
Milton Keynes
MK3 6DP
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1908 221 110
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk

Acal BFi UK Limited
3 The Business Centre
Molly Millars Lane
Wokingham
Berkshire
RG41 2EY
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1189 776 095
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20139 Milano (MI)
ITALY
Phone: +39 (02) 574651
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Email: lop@laseroptronic.it


Latvia (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl/


Lithuania (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl/


Norway

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PO Box 74
3529 Ryse
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Phone: +47 3216 2060

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Poland (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


Slovakia (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


Sweden

Acal BFi Nordic AB (Sweden)
Falhagsleden 59
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Alphen aan den Rijn

Acal BFi Netherlands BV
J.P. Thijsseweg 1e
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THE NETHERLANDS
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Fax: +31 (0) 4 0250 7409
Email: sales-nl@acalbfi.nl
URL: www.acalbfi.com/nl


Ukraine (Research Components)

SPECTROPOL
ul. Trakt Lubelski 271 G
04-667 Warszawa
POLAND

Phone: +48 22 617 67 17

Fax: +48 22 617 67 97

Website: https://www.spectropol.pl


United Kingdom

Pro-Lite Technology Limited
Innovation Centre, University Way
Cranfield, MK43 0BT, UK
Contact: Ross Tomlin
Phone: +44 (0)1234 436110
Email: ross.tomlin@pro-lite.co.uk
Website: www.pro-lite.co.uk

Milton Keynes

Acal BFi UK Limited
Room 1.09
Challenge House
Sherwood Drive
Bletchley
Milton Keynes
MK3 6DP
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1908 221 110
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk

Wokingham

Acal BFi UK Limited
3 The Business Centre
Molly Millars Lane
Wokingham
Berkshire
RG41 2EY
UNITED KINGDOM
Phone: +44 (0) 1189 788 878
Fax: +44 (0) 1189 776 095
Email: sales-uk@acalbfi.co.uk
URL: www.acalbfi.com/uk

Middle East

Middle East

Hinds Instruments, Inc.
7245 NE Evergreen Pkwy
Hillsboro, OR 97124
USA

Phone: 1.503.690.2000

Fax: 1.503.690.3000

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